Elimination of the axial deformation problem of Cu-TSV in 3D integration

Okoro, ChukwudiChukwudiOkoroHuyghebaert, CedricCedricHuyghebaertVan Olmen, JanJanVan OlmenLabie, RietRietLabieVandevelde, BartBartVandeveldeBeyne, EricEricBeyneVandepitte, DirkDirkVandepitte2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17729Elimination of the axial deformation problem of Cu-TSV in 3D integrationProceedings paper