MTF test system with AC based dynamic joule correction for electromigration tests on interconnects

Biesemans, L.L.BiesemansSchepers, K.K.SchepersVanstreels, KrisKrisVanstreelsD'Haen, JanJanD'HaenDe Ceuninck, WardWardDe CeuninckD'Olieslaeger, MarcMarcD'Olieslaeger2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8590MTF test system with AC based dynamic joule correction for electromigration tests on interconnectsProceedings paper