Van den Bosch, GeertGeertVan den BoschKar, Gouri SankarGouri SankarKarBlomme, PieterPieterBlommeArreghini, AntonioAntonioArreghiniCacciato, AntonioAntonioCacciatoBreuil, LaurentLaurentBreuilDe Keersgieter, AnAnDe KeersgieterParaschiv, VasileVasileParaschivVrancken, ChristaChristaVranckenDouhard, BastienBastienDouhardRichard, OlivierOlivierRichardVan Aerde, StevenStevenVan AerdeDebusschere, IngridIngridDebusschereVan Houdt, JanJanVan Houdt2021-10-192021-10-1920110741-3106https://imec-publications.be/handle/20.500.12860/19955Highly scaled vertical cylindrical SONOS cell with bi-layer poly-silicon channel for 3D NAND flash memoryJournal article