Tsunoda, IsaoIsaoTsunodaNakashima, ToshiyukiToshiyukiNakashimaNaka, NoboyukiNoboyukiNakaIdemoto, TatsuyaTatsuyaIdemotoYoneoka, MasahiMasahiYoneokaTakakura, KenichiroKenichiroTakakuraYoshino, KenjiKenjiYoshinoBargallo Gonzalez, MireiaMireiaBargallo GonzalezSimoen, EddyEddySimoenClaeys, CorCorClaeysOhyama, HidenoriHidenoriOhyama2021-10-202021-10-2020121610-1634https://imec-publications.be/handle/20.500.12860/21648Local compressive stress generation in electron irradiated boron-doped Si0.75Ge0.25/Si devicesJournal article