Two-dimensional carrier mapping at the nanometer-scale on 32nm node targeted p-MOSFETs using high vacuum scanning spreading resistance microscopy

Eyben, PierrePierreEybenClarysse, TrudoTrudoClarysseMody, JayJayModyNazir, AftabAftabNazirSchulze, AndreasAndreasSchulzeHantschel, ThomasThomasHantschelVandervorst, WilfriedWilfriedVandervorst2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18891Two-dimensional carrier mapping at the nanometer-scale on 32nm node targeted p-MOSFETs using high vacuum scanning spreading resistance microscopyProceedings paper