Fundamental study on the impact of C Co-implantation on ultra shallow B junctions

Zschaetzsch, GerdGerdZschaetzschVandervorst, WilfriedWilfriedVandervorstHoffmann, Thomas Y.Thomas Y.HoffmannEveraert, Jean-LucJean-LucEveraertdel Agua Borniquel, Jose IgnacioJose Ignaciodel Agua Borniquel2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16617Fundamental study on the impact of C Co-implantation on ultra shallow B junctionsProceedings paper