De Moor, PietPietDe MoorKavadias, SpyrosSpyrosKavadiasLeonov, VladimirVladimirLeonovVan Hoof, ChrisChrisVan Hoof2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5199Process development of fast and sensitive polySiGe microbolometer arraysProceedings paper