Predictive compact model for stress-induced on-product overlay correction

Zhang, HuaichenHuaichenZhangTabery, CyrusCyrusTaberyMaas, RubenRubenMaasKhodko, OleksandrOleksandrKhodkoBlanco, VictorVictorBlancoCanga, ErenErenCangaSchleicher, FilipFilipSchleicher2023-03-202023-03-012023-03-2020221932-5150WOS:000924949300019https://imec-publications.be/handle/20.500.12860/41210Predictive compact model for stress-induced on-product overlay correctionJournal article10.1117/1.JMM.21.4.043201WOS:000924949300019NONUNIFORM FILM STRESSESMISFIT STRAININCLUSIONPLATEFIELD