Integration of III-V on Si for high-mobility CMOS

Waldron, NiamhNiamhWaldronWang, G.G.WangNguyen, Ngoc DuyNgoc DuyNguyenOrzali, TommasoTommasoOrzaliMerckling, ClementClementMercklingBrammertz, GuyGuyBrammertzOng, PatrickPatrickOngWinderickx, GillisGillisWinderickxHellings, GeertGeertHellingsEneman, GeertGeertEnemanCaymax, MattyMattyCaymaxMeuris, MarcMarcMeurisHoriguchi, NaotoNaotoHoriguchiThean, AaronAaronThean2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21826Integration of III-V on Si for high-mobility CMOSProceedings paper