Using self-assembled monolayers as model substrates for atomic layer Deposition

Whelan, CarolineCarolineWhelanDemas, A.C.A.C.DemasSchuhmacher, JorgJorgSchuhmacherMaex, KarenKarenMaex2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9911Using self-assembled monolayers as model substrates for atomic layer DepositionOral presentation