Locorotondo, SabrinaSabrinaLocorotondoShamiryan, DenisDenisShamiryanParaschiv, VasileVasileParaschivBrus, StephanStephanBrusKottantharayil, AnilAnilKottantharayilBeckx, StephanStephanBeckxBoullart, WernerWernerBoullart2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10799Profile optimization for dry etched Ge-containing Si-gatesProceedings paper