Pathangi Sriraman, HariHariPathangi SriramanStokhof, MaartenMaartenStokhofKnaepen, WernerWernerKnaepenVaid, VarunVarunVaidMallik, ArindamArindamMallikChan, BTBTChanVandenbroeck, NadiaNadiaVandenbroeckMaes, JanJanMaesGronheid, RoelRoelGronheid2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27125Improved cost-effectiveness of the block co-polymer anneal process for DSAProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2512367