Radiation tolerance in HfSiON gate MOSFETs by high-energy Particles irradation

Hayama, K.K.HayamaTakakura, K.K.TakakuraNishimura, A.A.NishimuraOhyama, H.H.OhyamaMercha, AbdelkarimAbdelkarimMerchaSimoen, EddyEddySimoenClaeys, CorCorClaeys2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10549Radiation tolerance in HfSiON gate MOSFETs by high-energy Particles irradationOral presentation