Halder, SandipSandipHalderMiller, AndyAndyMillerVan Puymbroeck, JanJanVan PuymbroeckNieuborg, NancyNancyNieuborgBeyne, EricEricBeyne2021-10-222021-10-2220140894-6507https://imec-publications.be/handle/20.500.12860/23900Metrology and inspection requirements for successful stacking of integrated circuitsJournal articlehttp://ieeexplore.ieee.org/document/6869040/?arnumber=6869040