Lauwers, AnneAnneLauwersKittl, JorgeJorgeKittlAkheyar, AmalAmalAkheyarVan Dal, MarkMarkVan DalChamirian, OxanaOxanaChamiriande Potter de ten Broeck, MurielMurielde Potter de ten BroeckLindsay, RichardRichardLindsayMaex, KarenKarenMaex2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7785Silicide scaling: Co, Ni or CoNi ?Proceedings paper