Exploring GAA-Nanosheet, Forksheet and GAA-Forksheet Architectures: A TCAD-DTCO Study at 90 nm and 120-nm Cell Height

Gaddemane, GautamGautamGaddemaneSchuddinck, PieterPieterSchuddinckBhuwalka, KrishnaKrishnaBhuwalkaRzepa, GerhardGerhardRzepaMirabelli, GioeleGioeleMirabelliGupta, AnshulAnshulGuptaBoemmels, JuergenJuergenBoemmelsMatagne, PhilippePhilippeMatagneYakimets, DmitryDmitryYakimetsWu, HaoHaoWuHou, LeiLeiHouHellings, GeertGeertHellingsLiu, ChangzeChangzeLiu2025-08-152025-08-1520252168-6734WOS:001542447900016https://imec-publications.be/handle/20.500.12860/46073Exploring GAA-Nanosheet, Forksheet and GAA-Forksheet Architectures: A TCAD-DTCO Study at 90 nm and 120-nm Cell HeightJournal article10.1109/JEDS.2024.3498092WOS:001542447900016FINFETS