Rothschild, AudeAudeRothschildMitsuhashi, RiichirouRiichirouMitsuhashiKerner, ChristophChristophKernerShi, XiaopingXiaopingShiEveraert, Jean-LucJean-LucEveraertDate, LucienLucienDateConard, ThierryThierryConardRichard, OlivierOlivierRichardVrancken, EviEviVranckenVerbeeck, RitaRitaVerbeeckVeloso, AnabelaAnabelaVelosoLauwers, AnneAnneLauwersde Potter de ten Broeck, MurielMurielde Potter de ten BroeckDebusschere, IngridIngridDebusschereJurczak, GosiaGosiaJurczakNiwa, MasaakiMasaakiNiwaAbsil, PhilippePhilippeAbsilBiesemans, SergeSergeBiesemans2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12807Optimization of HfSiON using a design of experiment (DOE) approachJournal article