High-performance grating couplers on 220-nm thick silicon by inverse design for perfectly vertical coupling

Yang, MingxiangMingxiangYangYan, YunjieYunjieYanWu, ZhenlinZhenlinWuGu, YiYingYiYingGuZhao, ShiyuanShiyuanZhaoMorthier, GeertGeertMorthierZhao, MingshanMingshanZhao2024-03-112024-02-032024-03-1120232045-2322WOS:001139407500004https://imec-publications.be/handle/20.500.12860/43485High-performance grating couplers on 220-nm thick silicon by inverse design for perfectly vertical couplingJournal article10.1038/s41598-023-45168-2WOS:001139407500004WAVE-GUIDESEFFICIENTFIBERSMEDLINE:37872240