Towards Single-Molecule Sensing with an Ultra-Scaled 45 nm Gate Length FinFET Based Biosensor

Liu, LijunLijunLiuSantermans, SybrenSybrenSantermansFiligheddu, AliceAliceFilighedduDu Bois, BertBertDu BoisBarge, DavidDavidBargeSpampinato, ValentinaValentinaSpampinatoFranquet, AlexisAlexisFranquetRay Chaudhuri, AsheshAsheshRay ChaudhuriSeveri, SimoneSimoneSeveriVan Dorpe, PolPolVan DorpeMartens, KoenKoenMartens2024-02-062024-02-062024-06-160743-1562https://imec-publications.be/handle/20.500.12860/43497Towards Single-Molecule Sensing with an Ultra-Scaled 45 nm Gate Length FinFET Based BiosensorProceedings paperCMOS based BioFETBiosensorDNA detectionDNA oligoTowards single-molecule sensing