Cornelissen, IngridIngridCornelissenMeuris, MarcMarcMeurisWolke, K.K.WolkeWilkol, M.M.WilkolLoewenstein, LeeLeeLoewensteinDoumen, GeertGeertDoumenHeyns, MarcMarcHeyns2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3317Ozonated DI-water for clean chemical oxide growthProceedings paper