Boeckx, CarolienCarolienBoeckxDoise, JanJanDoiseChan, BTBTChanLorusso, GianGianLorussoSutani, TakumichiTakumichiSutaniKoshihara, ShunsukeShunsukeKoshiharaIshimoto, ToruToruIshimotoKato, TakeshiTakeshiKatoRincon Delgadillo, PaulinaPaulinaRincon DelgadilloDe Gendt, StefanStefanDe Gendt2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30271LCDU and placement improvement of contacts using EUV templated DSAOral presentation