Xu, XiuMeiXiuMeiXuVereecke, GuyGuyVereeckeChen, ChangChangChenPourtois, GeoffreyGeoffreyPourtoisArmini, SilviaSilviaArminiVerellen, NielsNielsVerellentsai, Wei-KangWei-KangtsaiStruyf, HerbertHerbertStruyfHolsteyns, FrankFrankHolsteynsmachalkov, victorvictormachalkovindekeu, josephjosephindekeuDe Gendt, StefanStefanDe Gendt2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23414Capturing wetting states in nanopatterned siliconMeeting abstract