Self focusing SIMS: a new metrology for the analysis of confined volumes

Franquet, AlexisAlexisFranquetDouhard, BastienBastienDouhardMorris, RichardRichardMorrisSpampinato, ValentinaValentinaSpampinatoConard, ThierryThierryConardVandervorst, WilfriedWilfriedVandervorst2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28354Self focusing SIMS: a new metrology for the analysis of confined volumesMeeting abstracthttp://sims.confer.uj.edu.pl/resources/Book_of_Abstracts_A4_v1.pdf