Gallagher, EmilyEmilyGallagherTimmermans, MarinaMarinaTimmermansPollentier, IvanIvanPollentierLee, Jae UkJae UkLeeMariano Juste, MarinaMarinaMariano JusteAdelmann, ChristophChristophAdelmannHuyghebaert, CedricCedricHuyghebaertScholze, FrankFrankScholzeLaubis, ChristianChristianLaubis2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30736CNTs in the context of EUV pellicle historyProceedings paperhttps://doi.org/10.1117/12.2297710