Micro-opto-mechanical pressure sensor (MOMPS) in SIN integrated photonics platform

Jansen, RoelofRoelofJansenRochus, VeroniqueVeroniqueRochusGoyvaerts, JeroenJeroenGoyvaertsVandenbosch, GuyGuyVandenboschvan de Voort, BobBobvan de VoortNeutens, PieterPieterNeutensO'Callaghan, JohnJohnO'CallaghanTilmans, HarrieHarrieTilmansRottenberg, XavierXavierRottenberg2021-10-232021-10-232016-05https://imec-publications.be/handle/20.500.12860/26780Micro-opto-mechanical pressure sensor (MOMPS) in SIN integrated photonics platformProceedings paperhttp://techconnectworld.com/World2016/a.php?i=184