Sedky, SherifSherifSedkyWitvrouw, AnnAnnWitvrouwSaerens, AnneliesAnneliesSaerensVan Houtte, P.P.Van HouttePoortmans, JefJefPoortmansBaert, KrisKrisBaert2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5644Effect of in situ boron doping on properties of silicon germanium films deposited by chemical vapor deposition at 400 degrees CJournal article