Ong, PatrickPatrickOngLeunissen, PeterPeterLeunissenAnsar, SheikSheikAnsarGillot, ChristopheChristopheGillotLan, YongqingYongqingLanNoller, BastianBastianNollerLi, YuzhuoYuzhuoLi2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21226Ge CMP process developmentOral presentation