Analysis of Collapse-Snapback Phenomena in Capacitive Micromachined Ultrasound Transducers

Halbach, ChloeChloeHalbachRochus, VeroniqueVeroniqueRochusGenoe, JanJanGenoeRottenberg, XavierXavierRottenbergCheyns, DavidDavidCheynsHeremans, PaulPaulHeremans2025-03-052025-03-052025-FEBWOS:001431567800001https://imec-publications.be/handle/20.500.12860/45309Analysis of Collapse-Snapback Phenomena in Capacitive Micromachined Ultrasound TransducersJournal article10.3390/mi16020160WOS:001431567800001PLATESCMUTS