Characterization and modelling of growth-induced defects in InGaAs by MOCVD

Hsu, BrentBrentHsuSimoen, EddyEddySimoenEneman, GeertGeertEnemanAlian, AliRezaAliRezaAlianMols, YvesYvesMolsHeyns, MarcMarcHeyns2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28537Characterization and modelling of growth-induced defects in InGaAs by MOCVDMeeting abstract