ESD challenges in advanced FinFET and GAA nanowire CMOS technologies

Chen, Shih-HungShih-HungChen2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30402ESD challenges in advanced FinFET and GAA nanowire CMOS technologiesOral presentationhttps://www.esda.org/assets/Updates/New%20directory/2018%20Symposium%20Program%20v25.pdf