Hauptmann, MarcMarcHauptmannBrems, StevenStevenBremsStruyf, HerbertHerbertStruyfMertens, PaulPaulMertensHeyns, MarcMarcHeynsDe Gendt, StefanStefanDe GendtGlorieux, ChristChristGlorieux2021-10-202021-10-2020120034-6748https://imec-publications.be/handle/20.500.12860/20791Time-resolved monitoring of cavitation activity in megasonic cleaning systemsJournal article