Wang, GangGangWangRosseel, ErikErikRosseelLoo, RogerRogerLooFavia, PaolaPaolaFaviaBender, HugoHugoBenderHeyns, MarcMarcHeynsVandervorst, WilfriedWilfriedVandervorst2021-10-192021-10-1920100003-6951https://imec-publications.be/handle/20.500.12860/18335High quality Ge epitaxial layers in narrow channels on Si (001) substratesJournal article