Accurate RF electrical characterisation of CSPs using MCM-D thin film technology

Chandrasekhar, ArunArunChandrasekharBeyne, EricEricBeyneDe Raedt, WalterWalterDe RaedtNauwelaers, BartBartNauwelaers2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8669Accurate RF electrical characterisation of CSPs using MCM-D thin film technologyJournal article