A comparative X-ray photoelectron spectroscopy and medium-energy ion-scattering study of ultra-thin, Hf-based high-k films

Sygellou, LLSygellouLadas, SSLadasReading, M.A.M.A.Readingvan den Berg, J.A.J.A.van den BergConard, ThierryThierryConardDe Gendt, StefanStefanDe Gendt2021-10-182021-10-182010-030142-2421https://imec-publications.be/handle/20.500.12860/18059A comparative X-ray photoelectron spectroscopy and medium-energy ion-scattering study of ultra-thin, Hf-based high-k filmsJournal articlehttp://www3.interscience.wiley.com/cgi-bin/fulltext/123328381/PDFSTART