Devriendt, KatiaKatiaDevriendtVrancken, EviEviVranckenGrillaert, JoostJoostGrillaertMeuris, MarcMarcMeurisHeylen, NancyNancyHeylenFyen, WimWimFyenHeyns, MarcMarcHeynsChung, A.A.ChungHsu, O.O.Hsu2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3417The effect of pad structuring on CMP performanceProceedings paper