Varela Pedreira, OlallaOlallaVarela PedreiraLesniewska, AlicjaAlicjaLesniewskaJourdan, NicolasNicolasJourdanVega Gonzalez, VictorVictorVega GonzalezLariviere, StephaneStephaneLarivierevan der Veen, MarleenMarleenvan der VeenCroes, KristofKristofCroesTokei, ZsoltZsoltTokei2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/34328Scaled TaN barriers for Cu interconnects: reliability performanceProceedings paperhttps://iitc-conference.org/technical-program-abstracts.html