Teugels, LieveLieveTeugelsKorner, ManuelaManuelaKornerHeylen, NancyNancyHeylenPham, NgaNgaPhamLeunissen, PeterPeterLeunissen2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21604New CMP challenges at imecOral presentation