Jonckheere, RikRikJonckheereBret, TristanTristanBretVan Den Heuvel, DieterDieterVan Den HeuvelMagana, John F.John F.MaganaGao, WeiminWeiminGaoWaiblinger, MarkusMarkusWaiblinger2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19137Repair of natural EUV reticle defectsProceedings paper