Selective Si Etchant for Gate-All-Around Transistors with Si1-xGex Channel

Harada, KenKenHaradaSuzuki, TatsunobuTatsunobuSuzukiAsano, MariMariAsanoKakeshita, KanKanKakeshitaPuttarame Gowda, PallaviPallaviPuttarame GowdaOniki, YusukeYusukeOnikiAltamirano Sanchez, EfrainEfrainAltamirano Sanchez2022-02-102021-12-012022-02-102021n/ahttps://imec-publications.be/handle/20.500.12860/38514Selective Si Etchant for Gate-All-Around Transistors with Si1-xGex ChannelMeeting abstract