Boeckx, CarolienCarolienBoeckxDoise, JanJanDoiseChan, BTBTChanGronheid, RoelRoelGronheidDe Gendt, StefanStefanDe Gendt2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26358Impact of template shape on CDU and pattern placement for grapho-epitaxy DSAProceedings paper