Minimization of MuGFET source/drain resistance using wrap-around NiSi contacts

Dixit, AbhisekAbhisekDixitKottantharayil, AnilAnilKottantharayilBrus, StephanStephanBrusRooyackers, RitaRitaRooyackersGoodwin, MichaelMichaelGoodwinCollaert, NadineNadineCollaertJurczak, GosiaGosiaJurczakDe Meyer, KristinKristinDe Meyer2021-10-162021-10-162005-04https://imec-publications.be/handle/20.500.12860/10394Minimization of MuGFET source/drain resistance using wrap-around NiSi contactsProceedings paper