Deposition of undoped and in-situ doped amorphous and polycrystalline silicon with LPCVD

Schaekers, MarcMarcSchaekersShi, XiaopingXiaopingShi2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11169Deposition of undoped and in-situ doped amorphous and polycrystalline silicon with LPCVDProceedings paper