Pokhrel, AnkitAnkitPokhrelHuet, BenjaminBenjaminHuetHodges, BlakeBlakeHodgesIbrahim, SeifallahSeifallahIbrahimBai, R.R.BaiBrebels, StevenStevenBrebelsJosephsen, T.T.JosephsenBuseyne, D.D.BuseyneDelie, GillesGillesDelieVangoidsenhoven, DizianaDizianaVangoidsenhovenElshaer, A.A.ElshaerTiwari, R.R.TiwariPerez Lozano, DanielDanielPerez LozanoSarkar, Sujan KumarSujan KumarSarkarZhang, L.L.ZhangDeckers, StevenStevenDeckersMalavipathirana, HasanthaHasanthaMalavipathiranaKoufalis, P.P.KoufalisMishra, R.R.MishraLi, C.C.LiO'Neal, SabineSabineO'NealNowack, K.K.NowackVan Bael, M. J.M. J.Van BaelValente-Feliciano, A-M.A-M.Valente-FelicianoPerumkunnil, ManuManuPerumkunnilTokei, ZsoltZsoltTokei2026-08-212026-08-212025979-8-3315-6786-62380-9248https://imec-publications.be/handle/20.500.12860/60083Superconducting (SC) electronics have emerged as a promising platform for high-speed, energy-efficient computing and quantum information processing. This work, centered on NbTiN, presents recent advances in material science and fabrication methods leading to significant improvements in performance, scalability and vertical integration. We specifically report on fabrication and characterization of key components, including Josephson junctions (JJs), flux trapping structures and SC interconnects. Together, these efforts represent critical steps towards realizing practical, complex, dense and large-scale SC integrated circuits.engProceedings paper10.1109/iedm50572.2025.11353860WOS:001701480300267