Looking Inside MEMS Packages: Investigation of the Hermeticity of MEMS thin Film Packages

Wang, BoBoWang2021-10-232021-10-232015-09https://imec-publications.be/handle/20.500.12860/26157Looking Inside MEMS Packages: Investigation of the Hermeticity of MEMS thin Film PackagesPHD thesishttps://limo.libis.be/primo-explore/fulldisplay?docid=LIRIAS1941787&context=L&vid=Lirias&search_scope=Lirias&tab=default_tab&lang=en_US&fromSitemap=1