Deng, ShaorenShaorenDengXie, QiQiXieDeduytsche, DavyDavyDeduytscheSchaekers, MarcMarcSchaekersLin, DennisDennisLinCaymax, MattyMattyCaymaxDelabie, AnneliesAnneliesDelabieVan den Berghe, SvenSvenVan den BergheQu, XinpingXinpingQuDetavernier, ChristopheChristopheDetavernier2021-10-192021-10-1920110003-6951https://imec-publications.be/handle/20.500.12860/18828Effective reduction of fixed charge densities in germanium based metal-oxide-semiconductor devicesJournal article