Souriau, LaurentLaurentSouriauHellin, DavidDavidHellinKunnen, EddyEddyKunnenVersluijs, JankoJankoVersluijsDekkers, HaroldHaroldDekkersAlbert, JohanJohanAlbertOrain, IsabelleIsabelleOrainYoshie, KimuraKimuraYoshieXu, KaidongKaidongXuVertommen, JohanJohanVertommenWiaux, VincentVincentWiauxBoullart, WernerWernerBoullart2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/2153415nm HP patterning with EUV lithography and SADPMeeting abstracthttp://www.dry-process.org/2012/index.html