Vanstreels, KrisKrisVanstreelsCiofi, IvanIvanCiofiBarbarin, YohanYohanBarbarinBaklanov, MikhaïlMikhaïlBaklanov2021-10-212021-10-2120131071-1023https://imec-publications.be/handle/20.500.12860/23305Influence of porosity on dielectric breakdown of ultralow-k dielectricsJournal article