Monolithic integration of Ge and III-V compound semiconductors on 300mm Si for CMOS

Caymax, MattyMattyCaymaxLoo, RogerRogerLooMerckling, ClementClementMercklingGuo, WeimingWeimingGuoJiang, SijiaSijiaJiangHeyns, MarcMarcHeynsVandervorst, WilfriedWilfriedVandervorst2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23614Monolithic integration of Ge and III-V compound semiconductors on 300mm Si for CMOSMeeting abstracthttp://www.emrs-strasbourg.com/index.php?option=com_content&task=view&id=716&Itemid=999