GaN based device structures grown in a close coupled showerhead MOCVD reactor

Thrush, E. J.E. J.ThrushKappers, M. J.M. J.KappersBougrioua, ZahiaZahiaBougriouaDavies, R. A.R. A.DaviesWallis, R. H.R. H.WallisPhillips, W. A.W. A.PhillipsConsidine, L.L.ConsidineHumphreys, C. J.C. J.HumphreysMoerman, IngridIngridMoerman2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5709GaN based device structures grown in a close coupled showerhead MOCVD reactorOral presentation