The unexpected effects of crystallization on Ta2O5 as studied by HRTEM and C-AFM

Celano, UmbertoUmbertoCelanoChintala, Ravi ChandraRavi ChandraChintalaAdelmann, ChristophChristophAdelmannRichard, OlivierOlivierRichardVandervorst, WilfriedWilfriedVandervorst2021-10-212021-10-212013-040167-9317https://imec-publications.be/handle/20.500.12860/22111The unexpected effects of crystallization on Ta2O5 as studied by HRTEM and C-AFMJournal articlehttp://www.sciencedirect.com/science/article/pii/S0167931713003766